Cover of MEMS and Microsystems

MEMS and Microsystems

by Tai-Ran Hsu

2004 436 pages eng

Microelectromechanical systems Électronique Matériaux Microelectronics Conception et construction

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the …

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