Microelectromechanical systems
30 books
MEMS and Microsystems
Introduction to bioMEMS
Electromechanical systems, electric machines, and applied mechatronics
Mechatronics
Foundations of MEMS
Fundamentals of microfabrication
Laboratory Exercises In Mechatronics
Advanced Mechatronics And Mems Devices
BioMEMS
Self Assembly
Microsystem design
MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
Fundamentals and applications of microfluidics
Handbook of silicon based MEMS
Spintronic materials and technology
Microelectrofluidic systems
Bio-MEMS
MICROSYSTEMS TECHNOLOGY: FABRICATION, TEST AND RELIABILITY; ED. BY JUMANA BOUSSEY
Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
Expeditionen in den Nanokosmos
A guide to hands-on MEMS design and prototyping
Essentials of micro- and nanofluidics
Piezoelectric-based vibration-control
Laser Diode Microsystems
An introduction to microelectromechanical systems engineering
Feedback control of MEMS to atoms
Neural Networks and Micromechanics
Mechanisms Transmissions And Applications
Modeling MEMS and NEMS
